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Editorial

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Burn J. Lin
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3160634

Open Access Open Access

Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

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Dan Sun; Hai-Qing Gong
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3100201
Topics: Electrodes
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Han Cheng; Kin Fong Lei; Kit Ying Choy; Larry M. C. Chow
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3152003
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Jinxing Liang; Toshitsugu Ueda
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3134087
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Fu-Xue Zhang; Qing-Wen Yan; Wei Zhang
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3122366
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Ming-Li Ke; Ray-Hua Horng; Yao-Cheng Tsai; Guan-Wei Chen; Chao-Chih Chang
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3142971
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Jinkui Chu; Xianggao Piao; Limin Jian; Hui Lin
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3152000

Special Section on Extreme-Ultraviolet Interference Lithography

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Franco Cerrina
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3156651
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Roel Gronheid; Michael J. Leeson
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3124188
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Bruce W. Smith
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3134094

Articles

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Masahiro Hashimoto; Hideaki Mitsui
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3116127
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Min K. Yang; Simon G. Kaplan; Roger H. French; John H. Burnett
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3124189
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Liang Zhu; Yingchun Zhang; Yili Gu; Steve Yang; Xiaohui Kang
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3155515
Topics: Lithography

COMMUNICATIONS

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Chris A. Mack
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3155516
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