Articles

Effect of process parameters and packing density on development times for densely packed high-aspect-ratio SU-8 microstructures in x-ray lithography

[+] Author Affiliations
Kaushal D. Vora

La Trobe University, Department of Physics, Bundoora 3086 Australia

Bor-Yaun Shew

National Synchrotron Radiation Research Center, Device Technology Group, 101, Hsin-Ann Road 30077, Hsinchu SBI Park, Taiwan

Erol C. Harvey

Swinburne University of Technology, Industrial Research Institute of Swinburne, 543-545 Burwood Road, Hawthorn, Victoria 3122 Australia

Jason P. Hayes

Swinburne University of Technology, Industrial Research Institute of Swinburne, 543-545 Burwood Road, Hawthorn, Victoria 3122 Australia

Andrew G. Peele

La Trobe University, Department of Physics, Bundoora 3086 Australia

J. Micro/Nanolith. MEMS MOEMS. 6(1), 013003 (March 12, 2007). doi:10.1117/1.2712868
History: Received June 26, 2006; Revised September 22, 2006; Accepted October 04, 2006; Published March 12, 2007
Text Size: A A A

We investigate the development time for densely packed high-aspect-ratio SU-8 structures. We find that a simple notch model as used by other workers to predict development time for isolated structures is inadequate for our case. We develop a theoretical model that allows the effects of mass transport of the resist in the developer to be included. By calibrating the process, we find that we are able to predict development time for our structures.

Figures in this Article
© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Kaushal D. Vora ; Bor-Yaun Shew ; Erol C. Harvey ; Jason P. Hayes and Andrew G. Peele
"Effect of process parameters and packing density on development times for densely packed high-aspect-ratio SU-8 microstructures in x-ray lithography", J. Micro/Nanolith. MEMS MOEMS. 6(1), 013003 (March 12, 2007). ; http://dx.doi.org/10.1117/1.2712868


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.