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Period and height control during the microcontact printing of alkoxysilane for optical gratings

[+] Author Affiliations
Arnaud Benahmed

University of California, Los Angeles, Center for Embedded Networked Sensing and Department of Mechanical Engineering, 420 Westwood Plaza, Los Angeles, California 90095

Robert Lam

University of California, Los Angeles, Center for Embedded Networked Sensing and Department of Mechanical Engineering, 420 Westwood Plaza, Los Angeles, California 90095

Nikolaus Rechner

University of California, Los Angeles, Center for Embedded Networked Sensing and Department of Mechanical Engineering, 420 Westwood Plaza, Los Angeles, California 90095

Chih-Ming Ho

University of California, Los Angeles, Center for Embedded Networked Sensing and Department of Mechanical Engineering, 420 Westwood Plaza, Los Angeles, California 90095

J. Micro/Nanolith. MEMS MOEMS. 6(2), 023007 (May 01, 2007). doi:10.1117/1.2731384
History: Received October 09, 2006; Revised February 09, 2007; Accepted February 13, 2007; Published May 01, 2007
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We present a one-step replication technique for optical gratings that allows the control of the corrugation height and period. By using an ink that slowly condenses into a multilayer polymer, it is possible to control the corrugation height by changing the condensation time. In addition, by applying a mechanical strain on the stamp, it is also possible to change the period of the grating. The combination of these two features added to the ease of use and low cost of this technique makes it very attractive for the fast prototyping of optical gratings for applications such as the measurement of surface plasmon band gaps. Corrugation heights in the range of 100 to 250nm and period variations up to 10% are achieved.

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© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Arnaud Benahmed ; Robert Lam ; Nikolaus Rechner and Chih-Ming Ho
"Period and height control during the microcontact printing of alkoxysilane for optical gratings", J. Micro/Nanolith. MEMS MOEMS. 6(2), 023007 (May 01, 2007). ; http://dx.doi.org/10.1117/1.2731384


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