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Characterization study of bonded and unbonded polydimethylsiloxane aimed for bio-micro-electromechanical systems-related applications

[+] Author Affiliations
Miao Liu

University of Central Florida, MEMS and Nanomaterials Lab, Mechanical, Materials and Aerospace Engineering Department, Orlando, Florida 32816-2450

Quanfang Chen

University of Central Florida, MEMS and Nanomaterials Lab, Mechanical, Materials and Aerospace Engineering Department, Orlando, Florida 32816-2450

J. Micro/Nanolith. MEMS MOEMS. 6(2), 023008 (May 11, 2007). doi:10.1117/1.2731381
History: Received September 15, 2005; Revised December 05, 2006; Accepted February 22, 2007; Published May 11, 2007
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Authors have demonstrated that by controlling the mixing ratio of polydimethylsiloxane’s (PDMS’s) two components—base polymer (part A) and a curing agent (part B)—different mechanical properties of PDMS can be achieved. Test results show that the Young’s modulus decreases as the increasing of mixing ratios (A:B). However, there is a transitional mixing ratio (part A:part B=10) after which the Young’s modulus is almost independent of the mixing ratio. The PDMS’s thickness plays an important role in determining the mechanical properties. The results show that the thinner the PDMS, the stiffer it behaves. The bonding strength between two cured PDMS parts with different mixing ratios shows that it depends on the mixing ratio. A maximum bonding strength of 130kPa occurs on a bonded couple with mixing ratios of 30A:1B and 3A:1B, respectively. The fracture on bonded specimens does not occur at the bonding interfaces. Instead it occurs at the side with a larger portion of part A. The intermediate material property formed at the interface is attributed to the diffusion layer formed.

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© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Miao Liu and Quanfang Chen
"Characterization study of bonded and unbonded polydimethylsiloxane aimed for bio-micro-electromechanical systems-related applications", J. Micro/Nanolith. MEMS MOEMS. 6(2), 023008 (May 11, 2007). ; http://dx.doi.org/10.1117/1.2731381


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