Articles

Laterally actuated multicontact MEMS relay fabricated using MetalMUMPS process: experimental characterization and multiscale contact modeling

[+] Author Affiliations
Lia Almeida

Auburn University, Department of Electrical and Computer Engineering, 200 Broun Hall, Auburn, Alabama 36849

Ramesh Ramadoss

Auburn University, Department of Electrical and Computer Engineering, 200 Broun Hall, Auburn, Alabama 36849

Robert Jackson

Auburn University, Department of Mechanical Engineering, Auburn, Alabama 36849

Koji Ishikawa

Yokohama National University, Department of Mechanical Engineering, Kanagawa 240-8501, Japan

Qiang Yu

Yokohama National University, Department of Mechanical Engineering, Kanagawa 240-8501, Japan

J. Micro/Nanolith. MEMS MOEMS. 6(2), 023009 (June 27, 2007). doi:10.1117/1.2744240
History: Received September 07, 2006; Revised February 01, 2007; Accepted February 01, 2007; Published June 27, 2007
Text Size: A A A

Multicontact MEMS relays laterally actuated using electrostatic comb-drive actuators are reported. The relay consists of a movable main beam anchored to the substrate using two identical folded suspension springs. Multicontact RF ports consist of five movable fingers connected to the movable main beam and six fixed fingers anchored to the substrate. Comb-drive actuators located at the top and bottom ends of the main beam enable bidirectional actuation of the RF contacts. The MEMS relays were fabricated using the MetalMUMPs process, which uses 20μm-thick electroplated nickel as the structural layer. A 3μm-thick gold layer was electroplated at the electrical contact surfaces. An example MEMS relay with planar contacts of area 80μm×20μm and a spacing of 10μm between the movable and fixed contacting surfaces is discussed. The overall size of the relay is approximately 3mm×3mm. “Resistance versus applied voltage” characteristics of the MEMS relay have been measured for applied DC bias voltages in the range of 172V to 220V. A multiscale rough surface contact model was used to estimate the actual electrical contact resistance versus applied force curve of these devices. The multiscale model showed good qualitative agreement with the experimental measurements but requires more refinement to achieve good quantitative agreement.

Figures in this Article
© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Lia Almeida ; Ramesh Ramadoss ; Robert Jackson ; Koji Ishikawa and Qiang Yu
"Laterally actuated multicontact MEMS relay fabricated using MetalMUMPS process: experimental characterization and multiscale contact modeling", J. Micro/Nanolith. MEMS MOEMS. 6(2), 023009 (June 27, 2007). ; http://dx.doi.org/10.1117/1.2744240


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.