Articles

Micro-electromechanical systems variable optical attenuator based on nonsilicon surface micromachining technology

[+] Author Affiliations
Xuhan Dai

Shanghai Jiaotong University, Institute of Micro and Nano Science and Technology, National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Huashang Road 1954#, Shanghai, 200030, China

Xiaolin Zhao

Shanghai Jiaotong University, Institute of Micro and Nano Science and Technology, National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Huashang Road 1954#, Shanghai, 200030, China

Guifu Ding

Shanghai Jiaotong University, Institute of Micro and Nano Science and Technology, National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Huashang Road 1954#, Shanghai, 200030, China

Bingchu Cai

Shanghai Jiaotong University, Institute of Micro and Nano Science and Technology, National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Huashang Road 1954#, Shanghai, 200030, China

J. Micro/Nanolith. MEMS MOEMS. 6(2), 023010 (June 29, 2007). doi:10.1117/1.2750653
History: Received May 21, 2006; Revised February 28, 2007; Accepted March 14, 2007; Published June 29, 2007
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A novel, electromagnetically driven variable fiber optic attenuator based on micro-electromechanical system (MEMS) technology is described. The attenuation level is adjusted by changing the microshutter position in the optical path. A new technique, termed “nonsilicon surface micromachining,” is used to fabricate the shutter, in which a copper layer was used as the sacrificial layer, and the electroplated FeNi as the structure layer. This scheme provides another way to fabricate the optical microstructure. The optical characteristics of the attenuator are theoretically analyzed, and the result is verified by experiments. The MEMS attenuator has fiber-to-fiber insertion loss less than 3dB at 1550-nm wavelength, dynamic range greater than 40dB, 0.2-dB repeatability, and return loss better than 40dB.

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© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Xuhan Dai ; Xiaolin Zhao ; Guifu Ding and Bingchu Cai
"Micro-electromechanical systems variable optical attenuator based on nonsilicon surface micromachining technology", J. Micro/Nanolith. MEMS MOEMS. 6(2), 023010 (June 29, 2007). ; http://dx.doi.org/10.1117/1.2750653


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