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Modeling and analysis of a low-actuation-voltage MEM mirror with spring structure for tunable optical filter

[+] Author Affiliations
Mohammad A. Matin

University of Denver, School of Engineering and Computer Science, 2390 S. York Street, Denver, Colorado 80208

Yun-Bo Yi, Vikram Gogte

University of Denver, School of Engineering and Computer Science, 2390 S. York Street, Denver, Colorado 80208

J. Micro/Nanolith. MEMS MOEMS. 6(2), 023011 (April 18, 2007). doi:10.1117/1.2731364
History: Received August 30, 2006; Revised December 14, 2006; Accepted December 20, 2006; Published April 18, 2007
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Tunable optical filters are key components for dense wavelength-division-multiplexed (DWDM) optical networks. One of the successful mechanisms to realize the wavelength tunability is by utilizing micro-electromechanical systems (MEMS) technology. The tuning mechanism works by applying a voltage between the top mirror and the bottom electrode. Micromechanically actuated optical filters are desirable because of their wide tuning range and process compatibility with other optoelectronic devices. Modeling and simulation play important roles in the MEMS domain. In this paper, we present four different mirror models. A detailed theoretical analysis including both static and dynamic aspects was developed on the four mirror models. A record tuning range of 149nm with a very small actuation voltage of 2.5V is achieved for the MEMS-based tunable optical filter.

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© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Mohammad A. Matin ; Yun-Bo Yi and Vikram Gogte
"Modeling and analysis of a low-actuation-voltage MEM mirror with spring structure for tunable optical filter", J. Micro/Nanolith. MEMS MOEMS. 6(2), 023011 (April 18, 2007). ; http://dx.doi.org/10.1117/1.2731364


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