Modeling and analysis of a low-actuation-voltage MEM mirror with spring structure for tunable optical filter

Mohammad A. Matin; Yun-Bo Yi; Vikram Gogte

doi:10.1117/1.2731364

1 April 2007 Modeling and analysis of a low-actuation-voltage MEM mirror with spring structure for tunable optical filter

Mohammad A. Matin, Yun-Bo Yi, Vikram Gogte

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 6, Issue 2, 023011 (April 2007). https://doi.org/10.1117/1.2731364

Abstract

Tunable optical filters are key components for dense wavelength-division-multiplexed (DWDM) optical networks. One of the successful mechanisms to realize the wavelength tunability is by utilizing micro-electromechanical systems (MEMS) technology. The tuning mechanism works by applying a voltage between the top mirror and the bottom electrode. Micromechanically actuated optical filters are desirable because of their wide tuning range and process compatibility with other optoelectronic devices. Modeling and simulation play important roles in the MEMS domain. In this paper, we present four different mirror models. A detailed theoretical analysis including both static and dynamic aspects was developed on the four mirror models. A record tuning range of 149 nm with a very small actuation voltage of 2.5 V is achieved for the MEMS-based tunable optical filter.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Mohammad A. Matin, Yun-Bo Yi, and Vikram Gogte "Modeling and analysis of a low-actuation-voltage MEM mirror with spring structure for tunable optical filter," Journal of Micro/Nanolithography, MEMS, and MOEMS 6(2), 023011 (1 April 2007). https://doi.org/10.1117/1.2731364

Published: 1 April 2007

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KEYWORDS

Mirrors

Optical filters

Microelectromechanical systems

Reflectivity

Capacitors

Optical simulations

Electromechanical design

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