Editorial

On the Birth of This Journal

J. Micro/Nanolith. MEMS MOEMS. 1(1), 4-5 (Apr 01, 2002). doi:10.1117/1.1458964
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It is an exciting time for “micro” technology. Authors working in microlithography, microfabrication, and microsystems finally have a home journal. Their work will be collected, peer reviewed, published, and archived. Most important, when literature in this field is needed, there is a clear place to locate it.

© 2002 Society of Photo-Optical Instrumentation Engineers

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Burn J. Lin, Editor-in-Chief
"On the Birth of This Journal", J. Micro/Nanolith. MEMS MOEMS. 1(1), 4-5 (Apr 01, 2002). ; http://dx.doi.org/10.1117/1.1458964


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