MICROMIRRORS

Design and characterization of two-axis rotational micromirrors using multi-user microelectromechanical system processes

[+] Author Affiliations
Julianna E. Lin, Vikas Sharma

McGill University, Department of Electrical and Computer Engineering, 3480 University Street, Montreal, QC?H3A?2A7, Canada

Feras S. J. Michael

Xanoptix Inc., 10 Al Paul Lane, Merrimack, New Hampshire?03054

Andrew G. Kirk

McGill University, Department of Electrical and Computer Engineering, 3480 University Street, Montreal, QC?H3A?2A7, Canada

J. Micro/Nanolith. MEMS MOEMS. 1(1), 70-78 (Apr 01, 2002). doi:10.1117/1.1445799
History: Received Aug. 31, 2001; Revised Nov. 30, 2001; Accepted Dec. 4, 2001
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The design and characterization of a two-axis rotational micromirror is explored. The mirrors were fabricated using a commercial microelectromechanical system (MEMS) foundry service, known as the multi-user MEMS processes (MUMPs) foundry service. The prototypes were then characterized using a phase-shifting Mirau interferometer. From these results, it was shown that the MUMPs process can be used to create satisfactory designs for rotational micromirrors with tilt angles in the range of 0–23 mrad and control voltages in the range of 0–30 V. In addition, the behavior of these mirrors was shown to fall within 5% of the values predicted by the theoretical models for the devices. © 2002 Society of Photo-Optical Instrumentation Engineers.

© 2002 Society of Photo-Optical Instrumentation Engineers

Citation

Julianna E. Lin ; Vikas Sharma ; Feras S. J. Michael and Andrew G. Kirk
"Design and characterization of two-axis rotational micromirrors using multi-user microelectromechanical system processes", J. Micro/Nanolith. MEMS MOEMS. 1(1), 70-78 (Apr 01, 2002). ; http://dx.doi.org/10.1117/1.1445799


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