OPTICAL IMAGING

KrF excimer laser trenching of X-cut LiNbO3 for realization of optimized optical modulator electrode structures

[+] Author Affiliations
Han-Woo Chong, Arnan Mitchell

RMIT University, Australian Photonics, CRC, GPO Box 2476V, Melbourne Vic?3001, AustraliaE-mail: hanwoo@lycos.com

Jason P. Hayes

IRIS, Swinburne University of Technology, CRC for Microtechnology, P.O. Box 218, Hawthorn, Melbourne?3122, Australia

Michael W. Austin

RMIT University, Australian Photonics, CRC, GPO Box 2476V, Melbourne Vic?3001, Australia

J. Micro/Nanolith. MEMS MOEMS. 1(2), 117-122 (Jul 01, 2002). doi:10.1117/1.1484160
History: Received Nov. 19, 2001; Revised Mar. 22, 2002; Accepted Apr. 1, 2002; Online July 19, 2002
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An investigation of the micromachining of trenches in lithium niobate (LiNbO3) using direct imaged 248 nm KrF excimer laser ablation is presented. Trenches 20 μm wide and 0.5–7.5 μm deep have been produced. These trenches are assessed and are deemed suitable for the machining of integrated electro-optic structures. Based on the characterized ablation conditions, trenches of high quality have been successfully fabricated on an X-cut optical modulator which is potentially important for the realization of efficient broadband optical intensity modulators. © 2002 Society of Photo-Optical Instrumentation Engineers.

© 2002 Society of Photo-Optical Instrumentation Engineers

Citation

Han-Woo Chong ; Arnan Mitchell ; Jason P. Hayes and Michael W. Austin
"KrF excimer laser trenching of X-cut LiNbO3 for realization of optimized optical modulator electrode structures", J. Micro/Nanolith. MEMS MOEMS. 1(2), 117-122 (Jul 01, 2002). ; http://dx.doi.org/10.1117/1.1484160


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