ORGANIC MICROMACHINING

Organic micromachining techniques for mass production of millimeter-wave and submillimeter-wave planar circuits

[+] Author Affiliations
Wai Y. Liu, D. Paul Steenson

University of Leeds, School of Electrical and Electronic Engineering, Institute of Microwaves and Photonics, Leeds, LS2?9JT?United Kingdom E-mail: flute@ieee.org

Michael B. Steer

North Carolina State University, Department of Electrical and Computer Engineering, Raleigh, North Carolina?27695-7911

J. Micro/Nanolith. MEMS MOEMS. 1(2), 150-153 (Jul 01, 2002). doi:10.1117/1.1463042
History: Received Aug. 31, 2001; Revised Dec. 14, 2001; Accepted Jan. 29, 2002; Online July 19, 2002
Text Size: A A A

In this paper we present a range of organic micromachining techniques that enable a planar membrane-based printed circuit to be fabricated on a 5 μm thick organic membrane in the absence of any steps involving thermal oxidation and low pressure chemical vapor deposition. The technologies are suitable for mass production of millimeter-wave or submillimeter-wave components. Transmission losses of a membrane-supported E-plane component are typically less than 0.5 dB/cm. © 2002 Society of Photo-Optical Instrumentation Engineers.

© 2002 Society of Photo-Optical Instrumentation Engineers

Citation

Wai Y. Liu ; D. Paul Steenson and Michael B. Steer
"Organic micromachining techniques for mass production of millimeter-wave and submillimeter-wave planar circuits", J. Micro/Nanolith. MEMS MOEMS. 1(2), 150-153 (Jul 01, 2002). ; http://dx.doi.org/10.1117/1.1463042


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.