Marathon evaluation of optical materials for 157-nm lithography

Vladimir Liberman; Mordechai Rothschild; Nikolay N. Efremow Jr.; Stephen T. Palmacci; Jan H. C. Sedlacek; Andrew Grenville; Kevin J. Orvek

doi:10.1117/1.1528948

1 January 2003 Marathon evaluation of optical materials for 157-nm lithography

Vladimir Liberman, Mordechai Rothschild, Nikolay N. Efremow Jr., Stephen T. Palmacci, Jan H. C. Sedlacek, Andrew Grenville, Kevin J. Orvek

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 2, Issue 1, (January 2003). https://doi.org/10.1117/1.1528948

Abstract

We present the methodology and recent results on the long-term evaluation of optical materials for 157-nm lithographic applications. We review the unique metrology capabilities that have been developed for accurately assessing optical properties of samples both online and offline, utilizing VUV spectrophotometry with in situ lamp-based cleaning. We describe ultraclean marathon testing chambers that have been designed to decouple effects of intrinsic material degradation from extrinsic ambient effects. We review our experience with lithography-grade 157-nm lasers and detector durability. We review the current status of bulk materials for lenses, such as CaF₂ and BaF₂, and durability results of antireflectance coatings. Finally, we discuss the current state of laser durability of organic pellicles.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Vladimir Liberman, Mordechai Rothschild, Nikolay N. Efremow Jr., Stephen T. Palmacci, Jan H. C. Sedlacek, Andrew Grenville, and Kevin J. Orvek "Marathon evaluation of optical materials for 157-nm lithography," Journal of Micro/Nanolithography, MEMS, and MOEMS 2(1), (1 January 2003). https://doi.org/10.1117/1.1528948

Published: 1 January 2003

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available