RESOLUTION ENHANCEMENT TECHNIQUES

Contrast analysis and optimization for resolution enhancement technique

[+] Author Affiliations
J. A. Torres

Mentor Graphics Corporation, 8005 SW Boeckman Road, Wilsonville, Oregon?97070-7777 E-mail: andres_torres@mentor.com

Y. Granik, F. Schellenberg

Mentor Graphics Corporation, 1001 Ridder Park Drive, San Jose, California?95131-2314

J. Micro/Nanolith. MEMS MOEMS. 2(2), 119-128 (Apr 01, 2003). doi:10.1117/1.1562931
History: Received May 29, 2002; Revised Nov. 11, 2002; Accepted Nov. 25, 2002; Online April 11, 2003
Text Size: A A A

We propose a framework for the analysis and characterization of the efficacy of any resolution enhancement technique (RET) in lithography. The method is based on extracting a distribution of the image log slope (ILS) for a given layout under a predefined set of optical conditions. This distribution is then taken as the optical signature for the image local contrast of the design. The optical signature can be created for an entire layout, or only for certain cells believed to be problematic. Comparisons can be made between the optical signatures generated using different illumination/RET strategies. We have used this method to evaluate and optimize two different RET approaches: subresolution assist features (SRAF) and double-exposure dipole illumination. © 2003 Society of Photo-Optical Instrumentation Engineers.

© 2003 Society of Photo-Optical Instrumentation Engineers

Citation

J. A. Torres ; Y. Granik and F. Schellenberg
"Contrast analysis and optimization for resolution enhancement technique", J. Micro/Nanolith. MEMS MOEMS. 2(2), 119-128 (Apr 01, 2003). ; http://dx.doi.org/10.1117/1.1562931


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.