MASK AND MASKLESS TECHNOLOGY

Sol-gel fabrication of high-quality photomask substrates

[+] Author Affiliations
Rahul Ganguli, D. Laurence Meixner, Steven G. Colbern, Matt S. Gleason, Douglas E. Meyers, S. Ray Chaudhuri

YTC America Inc., 3401 Calle Tecate, Camarillo, California 93012 E-mail: rganguli@ytca.com

J. Micro/Nanolith. MEMS MOEMS. 2(3), 195-199 (Jul 01, 2003). doi:10.1117/1.1584686
History: Received Jan. 2, 2003; Revised Mar. 14, 2003; Accepted Apr. 4, 2003; Online July 07, 2003
Text Size: A A A

Synthetic silica photomask substrates are currently manufactured by cutting from glass boules, which are prepared using a flame hydrolysis process. An alternative technique based on sol-gel processing demonstrates several potential advantages in fabricating high-quality substrates. This new approach allows near net shape fabrication of synthetic silica photomask substrates, eliminating the need for cutting and grinding. The complex relationship between glass properties and process parameters in the formulation, drying, and sintering steps has been determined, and a repeatable process has been established. The resulting substrates meet all SEMI specifications for ultra-low thermal expansion (ULTE) photomasks for 248-nm lithography. The technology may also be extended to 193-nm and 157-nm photomask substrates. This sol-gel-based process may represent a unique and cost-effective alternative for manufacturing photomask substrates for deep UV lithography. © 2003 Society of Photo-Optical Instrumentation Engineers.

© 2003 Society of Photo-Optical Instrumentation Engineers

Citation

Rahul Ganguli ; D. Laurence Meixner ; Steven G. Colbern ; Matt S. Gleason ; Douglas E. Meyers, et al.
"Sol-gel fabrication of high-quality photomask substrates", J. Micro/Nanolith. MEMS MOEMS. 2(3), 195-199 (Jul 01, 2003). ; http://dx.doi.org/10.1117/1.1584686


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Book Chapters

Topic Collections

Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.