CONTACT HOLE INSPECTION

Advanced inspection technique for deep-submicron and high-aspect-ratio contact holes

[+] Author Affiliations
Miyako Matsui, Mari Nozoe

Hitachi Limited, Central Research Laboratory, 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan E-mail: miyako-m@crl.hitachi.co.jp

Keiko Arauchi

Hitachi ULSI Systems, 2316 Imai-cho, Ome, Tokyo 198-8512, Japan

Atsuko Takafuji, Hidetoshi Nishiyama, Yasushi Goto

Hitachi Limited, Central Research Laboratory, 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan

J. Micro/Nanolith. MEMS MOEMS. 2(3), 227-232 (Jul 01, 2003). doi:10.1117/1.1585062
History: Received Sep. 20, 2002; Revised Mar. 3, 2003; Accepted Apr. 17, 2003; Online July 07, 2003
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We developed a technique using electron beams for inspecting contact holes immediately after dry etching and detecting incomplete contact failures. Wafers with deep-submicron contact holes that had high aspect ratios of 10 could be detected during practical inspection time by controlling the charging effect on the wafer surfaces. Measurements of the energy distribution in the secondary electrons exhausted from the bottom of the holes indicated that they were accelerated by the charge-up voltage on the wafer surfaces. Our analysis showed that high-density electron beams must be used to charge the surfaces when the aspect ratio is high. The minimum thickness of the residual SiO2 that could be detected at the bottom of the contact holes was 2 nm using an aspect ratio of 8. Applying this mechanism to optimize the dry etching process in semiconductor manufacturing showed that we could achieve reliable process control. © 2003 Society of Photo-Optical Instrumentation Engineers.

© 2003 Society of Photo-Optical Instrumentation Engineers

Citation

Miyako Matsui ; Mari Nozoe ; Keiko Arauchi ; Atsuko Takafuji ; Hidetoshi Nishiyama, et al.
"Advanced inspection technique for deep-submicron and high-aspect-ratio contact holes", J. Micro/Nanolith. MEMS MOEMS. 2(3), 227-232 (Jul 01, 2003). ; http://dx.doi.org/10.1117/1.1585062


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