SPECIAL SECTION ON SURFACE MICROMACHINING

New design for surface micromachined bistable and multistable switches

[+] Author Affiliations
Ian G. Foulds, Maria T. Trinh, Sam Hu, Steven W. Liao, Robert W. Johnstone, M. Ash Parameswaran

Simon Fraser University, Institute of Micromachine and Microfabrication Research, School of Engineering Science, Burnaby, British Columbia?V5A?1S6, Canada E-mail: ifoulds@sfu.ca

J. Micro/Nanolith. MEMS MOEMS. 2(4), 255-258 (Oct 01, 2003). doi:10.1117/1.1610476
History: Received Oct. 1, 2002; Accepted Apr. 22, 2003; Online October 03, 2003
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Microsystems often require switches or mechanisms to provide two stable states. In answer to this need, we design a novel micromechanical bistable switch based on the locking mechanism commonly used in extension ladders. This switch was designed and fabricated through the multiuser MEMS processes (MUMPs). Actual performance of the switch was videotaped, analyzed, and compared with theory and simulation. This design was fully functional on the first design iteration, and can easily be extended to provide multiple stable states. We outline the design, simulation, and results from the testing of the microfabricated system. © 2003 Society of Photo-Optical Instrumentation Engineers.

© 2003 Society of Photo-Optical Instrumentation Engineers

Citation

Ian G. Foulds ; Maria T. Trinh ; Sam Hu ; Steven W. Liao ; Robert W. Johnstone, et al.
"New design for surface micromachined bistable and multistable switches", J. Micro/Nanolith. MEMS MOEMS. 2(4), 255-258 (Oct 01, 2003). ; http://dx.doi.org/10.1117/1.1610476


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