SPECIAL SECTION ON SURFACE MICROMACHINING

Surface micromachined arch-shape on-chip 3-D solenoid inductors for high-frequency applications

[+] Author Affiliations
Nimit Chomnawang

University of Texas at Dallas, Erik Jonsson School of Engineering and Computer Science, 2601 North Floyd Road, Richardson, Texas 75083-0688 and Louisiana State University, Department of Electrical Engineering, Baton Rouge, Louisiana 70803-5901 and Suranaree University of Technology, School of Electrical Engineering, 111 University Avenue, Muang District, Nakon Rat Chasima 30000, Thailand

Jeong-Bong Lee

University of Texas at Dallas, Erik Jonsson School of Engineering and Computer Science, 2601 North Floyd Road, Richardson, Texas 75083-0688 and Louisiana State University, Department of Electrical Engineering, Baton Rouge, Louisiana 70803-5901 E-mail: jblee@utdallas.edu

Wendell Alan Davis

University of Texas at Arlington, Department of Electrical Engineering, Arlington, Texas 76011

J. Micro/Nanolith. MEMS MOEMS. 2(4), 275-281 (Oct 01, 2003). doi:10.1117/1.1610475
History: Received Oct. 1, 2002; Accepted Apr. 22, 2003; Online October 03, 2003
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We present the design, fabrication, and characterization of surface micromachined on-chip 3-D air-core arch-shape solenoid microinductors. Combinations of unique surface micromachining fabrication process techniques, such as deformation of polymeric sacrifical molds and conformal electrodeposition of photoresist molds on nonplanar sacrificial polymer mounds, are utilized. An air gap inserted between the inductor’s body and the substrate is used to reduce the degradations of high-frequency inductor performances. Fabricated inductors are characterized and modeled at high frequencies from S-parameter measurements. ABCD parameters, derived from measured S parameters, are translated into a simplified physical π model. The resulting 2-, 3-, and 5-turn arch-shape suspended air-core solenoid inductors have inductances between 0.62 to 0.79 nH, peak quality (Q) factors between 15.42 to 17 at peak-Q frequencies between 4.7 to 7.0 GHz, and self-resonant frequencies between 47.6 to 88.6 GHz. © 2003 Society of Photo-Optical Instrumentation Engineers.

© 2003 Society of Photo-Optical Instrumentation Engineers

Citation

Nimit Chomnawang ; Jeong-Bong Lee and Wendell Alan Davis
"Surface micromachined arch-shape on-chip 3-D solenoid inductors for high-frequency applications", J. Micro/Nanolith. MEMS MOEMS. 2(4), 275-281 (Oct 01, 2003). ; http://dx.doi.org/10.1117/1.1610475


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