Two-dimensional microlens arrays in silica-on-silicon planar lightwave circuit technology

Alexei L. Glebov; Lidu Huang; Shinegori Aoki; Michael Lee; Kishio Yokouchi

doi:10.1117/1.1610481

1 October 2003 Two-dimensional microlens arrays in silica-on-silicon planar lightwave circuit technology

Alexei L. Glebov, Lidu Huang, Shinegori Aoki, Michael Lee, Kishio Yokouchi

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 2, Issue 4, (October 2003). https://doi.org/10.1117/1.1610481

Abstract

Two-dimensional (2-D) microlens arrays have been fabricated with silica-on-silicon planar lightwave circuit (PLC) technology. Several experimental techniques and computer simulation methods are applied to characterize properties of single and double microlens arrays, with one and two refracting surfaces, respectively. Systematic comparison of the measured and simulated beam propagation profiles enables optimization of the lens and module design resulting in higher input-output coupling efficiency. The insertion losses of the lens-slab-lens optical modules with 90-mm-long slab waveguides are measured to be 2.1 and 3.5 dB for the double and single lens modules, respectively. Comprehensive analysis reveals the major loss contributions. Excess losses of the modules caused by variations of the lens curvatures, material refractive indexes, light wavelength, etc., can be controlled within the acceptable limits. Further possibilities for the module loss reduction are discussed. Fairly weak wavelength dependence as well as overall stability of the module properties indicate that the microlens arrays are suitable for dense wavelength division multiplexing (DWDM) photonic networks.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Alexei L. Glebov, Lidu Huang, Shinegori Aoki, Michael Lee, and Kishio Yokouchi "Two-dimensional microlens arrays in silica-on-silicon planar lightwave circuit technology," Journal of Micro/Nanolithography, MEMS, and MOEMS 2(4), (1 October 2003). https://doi.org/10.1117/1.1610481

Published: 1 October 2003

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