1 October 2003 High fill-factor avalanche photodetectors for near-infrared free-space photonic networks
Saurabh K. Lohokare, Dennis W. Prather, Thomas E. Dillon, Anita Sure, Oleg V. Sulima, Jeffery A. Cox, Michael G. Mauk
Author Affiliations +
Abstract
Diffractive optical elements (DOEs) offer the ability to boost fill factors of high-speed (field-of-view limited) near-infrared detectors. In this context, we have investigated the design and fabrication of a system that involves integration of DOEs with avalanche photodetectors (APDs). These APDs are implemented in the antimonide material system for operation around a 2.1-μm wavelength. Consequently, such systems could be used to reduce the required threshold power at free-space photonic receivers. To this end, we present the design and fabrication technologies for the DOEs, APDs, and their integration using polymer-based flip-chip interconnections.
©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Saurabh K. Lohokare, Dennis W. Prather, Thomas E. Dillon, Anita Sure, Oleg V. Sulima, Jeffery A. Cox, and Michael G. Mauk "High fill-factor avalanche photodetectors for near-infrared free-space photonic networks," Journal of Micro/Nanolithography, MEMS, and MOEMS 2(4), (1 October 2003). https://doi.org/10.1117/1.1607967
Published: 1 October 2003
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Avalanche photodetectors

Antimony

Gallium

Diffractive optical elements

Polymers

Aluminum

Zinc

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