MICRO-OPTICAL COMPONENTS

Replication of micro-optical components by ultraviolet-molding process

[+] Author Affiliations
Seok-min Kim, Dongmook Kim, Shinill Kang

Yonsei University, School of Mechanical Engineering, 134 Shinchon-dong, Seodaemoon-ku, Seoul, Korea E-mail: snlkang@yonsei.ac.kr

J. Micro/Nanolith. MEMS MOEMS. 2(4), 356-359 (Oct 01, 2003). doi:10.1117/1.1611183
History: Received Oct. 1, 2002; Revised Jun. 19, 2003; Accepted Jun. 20, 2003; Online October 03, 2003
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An experimental method is presented to maximize the replication quality of UV-molded micro-optical components. It is important to maximize the replication quality to obtain the replicated micro-optical components with the desired properties by accurate control of the shape. We suggest a simple technique to avoid micro air bubbles. The effects of the UV-curing dose and the compression pressure on the replication quality of UV-molded structures are examined experimentally. Finally, as a practical application of the process design method, microlens arrays with diameters between 30 and 230 μm were fabricated by the presented method, and the replication quality and the optical properties of the replicated microlens are measured and analyzed. © 2003 Society of Photo-Optical Instrumentation Engineers.

© 2003 Society of Photo-Optical Instrumentation Engineers

Citation

Seok-min Kim ; Dongmook Kim and Shinill Kang
"Replication of micro-optical components by ultraviolet-molding process", J. Micro/Nanolith. MEMS MOEMS. 2(4), 356-359 (Oct 01, 2003). ; http://dx.doi.org/10.1117/1.1611183


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