Special Section on Immersion Lithography

Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

[+] Author Affiliations
John H. Burnett, Simon G. Kaplan

National Institute of Standards and Technology, Gaithersburg, Maryland 20899

J. Micro/Nanolith. MEMS MOEMS. 3(1), 68-72 (Jan 01, 2004). doi:10.1117/1.1632501
History: Received Jun. 10, 2003; Revised Aug. 20, 2003; Accepted Aug. 21, 2003; Online February 17, 2004
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We present accurate measurements of several important optical constants of high-purity water for wavelengths near 193.39 nm at 21.50°C: the absolute refractive index n=1.43662(2), the dispersion dn/dλ=2.109(17)×103nm1, and the thermo-optic coefficient dn/dT=1.00(4)×104(°C)1. We determine these values by two independent approaches, the minimum deviation prism method and an interferometric technique, and find that they give mutually consistent results. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

John H. Burnett and Simon G. Kaplan
"Measurement of the refractive index and thermo-optic coefficient of water near 193 nm", J. Micro/Nanolith. MEMS MOEMS. 3(1), 68-72 (Jan 01, 2004). ; http://dx.doi.org/10.1117/1.1632501


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