Microelectromechanical Systems

Laser-based fabrication of polymer micropump

[+] Author Affiliations
Xianfan Xu

Purdue University, School of Mechanical Engineering, West Lafayette, Indiana?47907 E-mail: xxu@ecn.purdue.edu

J. Micro/Nanolith. MEMS MOEMS. 3(1), 152-158 (Jan 01, 2004). doi:10.1117/1.1631923
History: Received Apr. 22, 2003; Revised Aug. 13, 2003; Accepted Aug. 19, 2003; Online February 17, 2004
Text Size: A A A

Diffuser micropumps are commonly fabricated using the standard lithography techniques with silicon as the base material. The important components of this type of micropumps are flow-directing diffusers and a moving diaphragm. Different diffuser designs show various flow rates and pump efficiency. In this work a polymer is used as the base material instead of silicon. It is demonstrated that polymer-based micropumps can be conveniently fabricated using the laser machining technique. Moreover, because of the flexibility of polymer materials, there is great potential to improve the performance of the polymer micropumps. The fluid flow inside the diffuser polymer micropump is also calculated using computational fluid dynamics methods and the simulated results are compared with the experimental data. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Joohan Kim and Xianfan Xu
"Laser-based fabrication of polymer micropump", J. Micro/Nanolith. MEMS MOEMS. 3(1), 152-158 (Jan 01, 2004). ; http://dx.doi.org/10.1117/1.1631923


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.