Special Section on Mask Technology for Optical Lithography

Mask Technology for Optical Lithography

J. Micro/Nanolith. MEMS MOEMS. 3(2), 202 (Apr 01, 2004). doi:10.1117/1.1715096
History: Online March 31, 2004
Text Size: A A A

Extract

Maskmaking is an essential element of any lithography system and is more critical today than at any time in recent memory. After the transition from 1× to 5× reticles in the 1980s, which started the sometimes called “maskmaker’s vacation,” reticles were viewed simply as a commodity product that contained magnified binary layouts of the wafer pattern. Then, as feature sizes continued to shrink, the relaxation in specifications gained by the switch to 5× magnification eroded away, and maskmaking again became a critical element in any lithography strategy.

© 2004 Society of Photo-Optical Instrumentation Engineers

First Page Preview

View Large
First page PDF preview

Citation

Kevin D. Cummings and Frank M. Schellenberg
"Mask Technology for Optical Lithography", J. Micro/Nanolith. MEMS MOEMS. 3(2), 202 (Apr 01, 2004). ; http://dx.doi.org/10.1117/1.1715096


Figures

Tables

References

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.