Micromachining

Glass cutting by femtosecond pulsed irradiation

[+] Author Affiliations
Egidijus Vanagas, Jouji Kawai, Dmitrii Tuzhilin, Igor Kudryashov

Tokyo Instruments Inc., 6-18-14 Nishikasai, Edogawa-ku, Tokyo?134-0088, Japan

Atsushi Mizuyama, Kazutaka G. Nakamura, Ken-Ichi Kondo

Tokyo Institute of Technology, Materials and Structures Laboratory, 4259 Nagatsuta-cho, Midori-ku, Yokohama-shi, Kanagawa?226-8503, Japan

Shin-ya Koshihara, Masaki Takesada, Kazunari Matsuda

Kanagawa Academy of Science and Technology KSP East 301, 3-2-1 Sakado Takatsu-ku, Kawasaki-shi Kanagawa?213-0012, Japan

Saulius Juodkazis*, Vygandas Jarutis, Shigeki Matsuo

CREST-JST, The University of Tokushima, 2-1 Minamijosanjima, Tokushima?770-8506, Japan E-mail: saulius@eco.tokushima-u.ac.jp

Hiroaki Misawa

CREST-JST, Hokkaido University, Research Institute for Electronic Science, Sapporo?060-0812, Japan E-mail address: misawa@es.hskudai.ac.jp

J. Micro/Nanolith. MEMS MOEMS. 3(2), 358-363 (Apr 01, 2004). doi:10.1117/1.1668274
History: Received Jun. 4, 2002; Revised Aug. 29, 2003; Accepted Sep. 2, 2003; Online March 31, 2004
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We report on quartz and glass cutting by a lateral scanning of femtosecond pulses (150 fs at 1 kHz repetition rate) of 800 nm wavelength at room and low pressure (5 Torr) air ambience. Pulses were focused by a low numerical aperture (NA0.1) objective lens. Optimization of fabrication conditions: pulse energy and scanning speed were carried out to achieve large-scale (millimeter-to-centimeter) cutting free of microcracks of submicron dimensions along the edges and walls of the cut. Cutting through out the samples of 0.1–0.5 mm thickness was successfully achieved without apparent heat affected zone. At low air pressure (5 Torr) ambience, redeposition of ablated material was considerably reduced. It is demonstrated that the damage on the rear surface was induced by the stress waves, which originated from the plasma ablation pressure pulse. The mechanism of femtosecond-laser cutting of transparent materials at high irradiance and the influence of stress waves generated by plasma plume are discussed. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Egidijus Vanagas ; Jouji Kawai ; Dmitrii Tuzhilin ; Igor Kudryashov ; Atsushi Mizuyama, et al.
"Glass cutting by femtosecond pulsed irradiation", J. Micro/Nanolith. MEMS MOEMS. 3(2), 358-363 (Apr 01, 2004). ; http://dx.doi.org/10.1117/1.1668274


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