EUV Lithography

Fabrication of a complex-shaped mirror by arranging silicon mirror elements

[+] Author Affiliations
Hideo Takino, Masaaki Kuki, Akinori Itoh, Hideki Komatsuda, Kazushi Nomura, Norio Shibata

Nikon Corporation, 1-10-1 Asamizodai Sagamihara, Kanagawa?228-0828, Japan E-mail: takino@nikongw.nikon.co.jp

J. Micro/Nanolith. MEMS MOEMS. 3(3), 396-401 (Jul 01, 2004). doi:10.1117/1.1756165
History: Received Jun. 9, 2003; Revised Sep. 17, 2003; Accepted Oct. 9, 2003; Online July 19, 2004
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We propose a method for the fabrication of the mirror elements that compose the complex-shaped fly-eye mirrors for use in an extreme ultraviolet lithography (EUVL) system. In this method, silicon blocks are polished to have a spherical shape and smoothness, from which the mirror elements are cut out by wire electrical discharge machining. Thus, this method enables more effective fabrication of the mirror elements than the method proposed previously. To evaluate the effectiveness of the present method, the mirror elements having a flat reflective surface are fabricated as a preliminary experiment. The resultant mirror elements have highly accurate and smooth surfaces, although they have a unique shape compared to that of general optics. Moreover, to construct the fly-eye mirror, we propose a method for arranging the mirror elements, in which mirror elements are fixed to a base plate containing magnets. This allows the accurate arrangement of all the reflective surfaces relative to the base plate. To enable their attraction to the magnets, the bottom of the silicon mirror elements is plated with metal. Experiments confirm the mirror elements are accurately arranged. Thus, we demonstrate that the proposed methods are useful in realizing the fly-eye mirror. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Hideo Takino ; Masaaki Kuki ; Akinori Itoh ; Hideki Komatsuda ; Kazushi Nomura, et al.
"Fabrication of a complex-shaped mirror by arranging silicon mirror elements", J. Micro/Nanolith. MEMS MOEMS. 3(3), 396-401 (Jul 01, 2004). ; http://dx.doi.org/10.1117/1.1756165


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