Microplanar Waveguides

Design and performance of bilateral interdigital coplanar waveguide phase shifter for rf communication applications

[+] Author Affiliations
Hargsoon Yoon, Vijay K. Varadan

The Pennsylvania State University, Center for the Engineering of Electronic and Acoustic Materials and Devices, University Park, Pennsylvania?16802 E-mail: vjvesm@engr.psu.edu

J. Micro/Nanolith. MEMS MOEMS. 3(3), 459-466 (Jul 01, 2004). doi:10.1117/1.1759331
History: Received Apr. 23, 2003; Revised Nov. 26, 2003; Accepted Dec. 2, 2003; Online July 19, 2004
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A new design of a bilateral interdigital coplanar waveguide (BI-CPW) phase shifter using tunable barium strontium titanate thin film is presented and analyzed. This new design has shown a phase shift of 203°/cm at 25 GHz. Compared to a normal coplanar waveguide (CPW) type, a two-thirds size BI-CPW phase shifter is realized by interdigital capacitive loading. The phase shifter is fabricated with processes fully compatible with current SiGe technology. In addition, it is shown that operating voltages can be reduced significantly within a practical range by the inclusion of a polysilicon layer as a control electrode. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Hargsoon Yoon and Vijay K. Varadan
"Design and performance of bilateral interdigital coplanar waveguide phase shifter for rf communication applications", J. Micro/Nanolith. MEMS MOEMS. 3(3), 459-466 (Jul 01, 2004). ; http://dx.doi.org/10.1117/1.1759331


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