Three-Dimensional Micromachining

Photothermal three-dimensional fabrication of polymers using diode-pumped solid state lasers

[+] Author Affiliations
Won Seok Chang, Bo Sung Shin, Jaegu Kim, Kyung Hyun Whang

Korea Institute of Machinery and Materials, Nanoprocess Group, 171 Jang-dong, Yusung-gu, Daejeon?305-343, Korea E-mail: paul@kimm.re.kr

J. Micro/Nanolith. MEMS MOEMS. 3(3), 472-477 (Jul 01, 2004). doi:10.1117/1.1753589
History: Received Aug. 18, 2003; Revised Oct. 24, 2003; Accepted Nov. 26, 2003; Online July 19, 2004
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A layer-by-layer laser ablation process of polymers with a diode-pumped solid state (DPSS) third harmonic Nd:YVO4 laser with wavelength of 355 nm is developed to fabricate a 3-D microshape. Polymer fabrication using DPSS lasers has some advantages compared with the conventional polymer ablation process using KrF and ArF lasers with 248 and 193 nm wavelengths, such as pumping efficiency and low maintenance fees. This method also makes it possible to fabricate 2-D patterns or 3-D shapes rapidly and cheaply because CAD/CAM software and precision stages only are used without complex projection mask techniques. The photomachinability of polymers is highly influenced by laser wavelength and its own chemical structure. So the optical characteristics of polymers for a 355-nm laser source are investigated experimentally and theoretically. The photophysical and photochemical parameters such as laser fluence, focusing position, and ambient gas are considered to reduce the plume effect, which induces the redeposited debris on the surface of a substrate. Thus, the process parameters are tuned to optimize gaining precision surface shape and quality. This direct photomachining technology using DPSS lasers could be expected to manufacture the prototype of microdevices and be the mold for the laser-LIGA process. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Won Seok Chang ; Bo Sung Shin ; Jaegu Kim and Kyung Hyun Whang
"Photothermal three-dimensional fabrication of polymers using diode-pumped solid state lasers", J. Micro/Nanolith. MEMS MOEMS. 3(3), 472-477 (Jul 01, 2004). ; http://dx.doi.org/10.1117/1.1753589


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