Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers

Joohan Kim; Halil Berberoglu; Xianfan Xu

doi:10.1117/1.1759330

1 July 2004 Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers

Joohan Kim, Halil Berberoglu, Xianfan Xu

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 3, Issue 3, (July 2004). https://doi.org/10.1117/1.1759330

Abstract

We discuss laser fabrication of microstructures in photoetchable glass ceramics called Foturan (Schott Company, Elmsford, NY). A KrF excimer laser (λ = 248 nm, τ = 25 ns) is used for surface micromachining, and a femtosecond laser (λ = 800 nm, τ = 80 fs) is used for fabricating 3-D structures. Important aspects of the machining, such as depth of machining resulting from different laser processing parameters and threshold laser fluences, are presented. A detailed analysis of the absorption process of both lasers in photoetchable glass ceramics is provided.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Joohan Kim, Halil Berberoglu, and Xianfan Xu "Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(3), (1 July 2004). https://doi.org/10.1117/1.1759330

Published: 1 July 2004

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