Three-Dimensional Micromachining

Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers

[+] Author Affiliations
Joohan Kim, Halil Berberoglu, Xianfan Xu

Purdue University, School of Mechanical Engineering, West Lafayette, Indiana?47907 E-mail: xxu@ecn.purdue.edu

J. Micro/Nanolith. MEMS MOEMS. 3(3), 478-485 (Jul 01, 2004). doi:10.1117/1.1759330
History: Received Mar. 5, 2003; Revised Dec. 19, 2003; Accepted Dec. 19, 2003; Online July 19, 2004
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We discuss laser fabrication of microstructures in photoetchable glass ceramics called Foturan (Schott Company, Elmsford, NY). A KrF excimer laser (λ=248nm,τ=25ns) is used for surface micromachining, and a femtosecond laser (λ=800nm,τ=80fs) is used for fabricating 3-D structures. Important aspects of the machining, such as depth of machining resulting from different laser processing parameters and threshold laser fluences, are presented. A detailed analysis of the absorption process of both lasers in photoetchable glass ceramics is provided. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Joohan Kim ; Halil Berberoglu and Xianfan Xu
"Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers", J. Micro/Nanolith. MEMS MOEMS. 3(3), 478-485 (Jul 01, 2004). ; http://dx.doi.org/10.1117/1.1759330


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