Fabrication by Excimer Laser Ablation

Numerical method to predict and fabricate aspherical microlens arrays using 248-nm excimer laser ablation

[+] Author Affiliations
C. T. Pan

National Sun Yat-Sen University, Center for Nanoscience & Nanotechnology, Department of Mechanical and Electro-Mechanical Engineering, Kaoshiung?804, Taiwan E-mail: panct@mail.nsysu.edu.tw

S. C. Shen

Industrial Technology Research Institute, Mechanical Industry Research laboratories, Hsinchu?310, Taiwan

Chi-Chang Hsieh, Chi-Hui Chien

National Sun Yat-Sen University, Center for Nanoscience & Nanotechnology, Department of Mechanical and Electro-Mechanical Engineering, Kaoshiung?804, Taiwan

Yung-Chang Chen

National Pingtung University of Science and Technology, Department of Vehicle Engineering, Pingtung?912, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 3(4), 555-562 (Oct 01, 2004). doi:10.1117/1.1794178
History: Received May 12, 2003; Revised Jan. 15, 2004; Accepted Mar. 22, 2004; Online October 08, 2004
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A method of numerical simulations is used to predict the profile of a 3-D aspherical microlens array. Based on the simulated results, the desired micro-optical lens profile is obtained through excimer laser ablation. The simulation method applied in the excimer laser ablation can significantly reduce the quantity of microablation experiments. The ablated microstructures with surface average roughness of Ra<20nm are successfully achieved for micro-optical components. The excimer laser ablation parameters include laser fluence, shot number, workstation scanning velocity, and repetition rate. Various profiles of microlens and microprism arrays with different dimensions can utilize numerical simulation and form desired geometries by laser ablation. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

C. T. Pan ; S. C. Shen ; Chi-Chang Hsieh ; Chi-Hui Chien and Yung-Chang Chen
"Numerical method to predict and fabricate aspherical microlens arrays using 248-nm excimer laser ablation", J. Micro/Nanolith. MEMS MOEMS. 3(4), 555-562 (Oct 01, 2004). ; http://dx.doi.org/10.1117/1.1794178


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