Fabrication of High-Aspect-Ratio Microstructures

Ultrathick SU-8 fabrication for microreciprocating engines

[+] Author Affiliations
Peng Jin, Kyle Jiang

University of Birmingham, Centre for MicroEngineering and NanoTechnology, Birmingham, United Kingdom?B15?2TT E-mail: k.c.jiang@bham.ac.uk

Nianjun Sun

Beijing Aeronautical Manufacturing Technology Research Institute, P.O. Box 863, Beijing?100024, China

J. Micro/Nanolith. MEMS MOEMS. 3(4), 569-573 (Oct 01, 2004). doi:10.1117/1.1793155
History: Received Apr. 4, 2003; Revised Jan. 19, 2004; Accepted Mar. 3, 2004; Online October 08, 2004
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We present a high-quality UV-lithography process for making high aspect ratio microstructures for microengines using an ultrathick SU-8 photoresist layer. The microreciprocating engine project, which is ongoing at the University of Birmingham, aims to develop a compact power plant to replace batteries. The design of the microengine imposes strict requirements on the geometry of the engine components. The microfabrication research work has been concentrated on developing a SU-8 UV-lithography process to achieve good sidewall angles and high aspect ratio. Based on the study of the photoactive property of ultrathick SU-8 layers, an optimized prebake time is found for obtaining the minimum UV absorption of SU-8. The optimization process is tested and proven effective using a series of UV-lithography experiments on different prebake times. Microstructures with aspect ratios as high as 40:1 are produced in 1000-μm ultrathick SU-8 layers using standard UV-lithography equipment. The sidewall angles are controlled between 85 to 90 deg. The engine components fabricated using this process satisfy microengine design requirements. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Citation

Peng Jin ; Kyle Jiang and Nianjun Sun
"Ultrathick SU-8 fabrication for microreciprocating engines", J. Micro/Nanolith. MEMS MOEMS. 3(4), 569-573 (Oct 01, 2004). ; http://dx.doi.org/10.1117/1.1793155


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