Fabrication of Microelectronic Pressure Sensors

Fabrication of a novel vacuum microelectronic pressure sensor

[+] Author Affiliations
Zhiyu Wen, Zhongquan Wen, Gang Chen

Chongqing University, College of OptoElectronic Engineering, Chongqing?400044, China

Shiliu Xu

China Electronics Technology Group Corporation, Number 24 Research Institute, Chongqing?400060, China

J. Micro/Nanolith. MEMS MOEMS. 3(4), 574-578 (Oct 01, 2004). doi:10.1117/1.1792651
History: Received Oct. 2, 2003; Revised Jan. 8, 2004; Accepted Mar. 22, 2004; Online October 08, 2004
Text Size: A A A

By combining silicon dry corrosion, wet corrosion, oxidizing sharpening and vacuum bonding techniques, and the theoretic calculation of elastic membranes and the distance from the catelectrode to the anode, a novel vacuum microelectronic pressure senor with overload protection is developed. The density of the field emission catelectrode array is about 24,000/mm2. The starting emission voltage is 0.5 to 1.5 V; backward voltage is higher than 25 V. When the forward voltage is 5 V, pressure sensitivity is 30.1 mV/kPa. The temperature error is 0.5% between 20 and 122°C. © 2004 Society of Photo-Optical Instrumentation Engineers.

© 2004 Society of Photo-Optical Instrumentation Engineers

Topics

Fabrication ; Sensors

Citation

Zhiyu Wen ; Zhongquan Wen ; Gang Chen and Shiliu Xu
"Fabrication of a novel vacuum microelectronic pressure sensor", J. Micro/Nanolith. MEMS MOEMS. 3(4), 574-578 (Oct 01, 2004). ; http://dx.doi.org/10.1117/1.1792651


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.