Contact hole formation by multiple exposure technique in ultralow k1 lithography

Hiroko Nakamura; Yasunobu Onishi; Kazuya Sato; Satoshi Tanaka; Shoji Mimotogi; Koji Hashimoto; Soichi Inoue

doi:10.1117/1.1899324

1 April 2005 Contact hole formation by multiple exposure technique in ultralow k₁ lithography

Hiroko Nakamura, Yasunobu Onishi, Kazuya Sato, Satoshi Tanaka, Shoji Mimotogi, Koji Hashimoto, Soichi Inoue

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 4, Issue 2, 023005 (April 2005). https://doi.org/10.1117/1.1899324

Abstract

The double line and space (L&S) formation method with L&S masks and dipole illumination was found to have high capability to fabricate ~0.3 k₁ contact hole (C/H) pattern. The procedure was as follows. The first L&S pattern was formed and was hardened to avoid the dissolution and mixing during the second resist coating. The second L&S pattern perpendicular to the first one was formed on the first resist pattern. The common space area of the two patterns became 1:1 C/H pattern. Simulation results showed that the double L&S formation method has much wider lithography latitude than other methods, such as single exposure of a C/H mask with quadrupole illumination, single exposure of a vortex mask with conventional illumination, and double exposure of L&S masks with dipole illumination to a single-layer resist. A 75 nm (0.30 k₁) 1:1 C/H pattern was fabricated. An 80 nm (0.32 k₁) 1:1 C/H pattern had 280 and 600 nm depth of focus in each resist layer at 8% exposure latitude. Moreover, a new method, in which a C/H mask replaces the L&S masks, is proposed to achieve cost reduction and the same high performance as the L&S masks.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Hiroko Nakamura, Yasunobu Onishi, Kazuya Sato, Satoshi Tanaka, Shoji Mimotogi, Koji Hashimoto, and Soichi Inoue "Contact hole formation by multiple exposure technique in ultralow k₁ lithography," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(2), 023005 (1 April 2005). https://doi.org/10.1117/1.1899324

Published: 1 April 2005

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