Articles

Development of all metal electrothermal actuator and its applications

[+] Author Affiliations
JiKui (Jack) Luo, Johnny H. He, Andrew Flewitt, D. F. Moore

University of Cambridge, Department of Engineering, Cambridge, CB2 1PZ, United Kingdom

S. Mark Spearing

Massachusetts Institute of Technology, Department of Aeronautics & Astronautics, Cambridge, Massachusetts 02139

Norman A. Fleck, W. I. Milne

University of Cambridge, Department of Engineering, Cambridge, CB2 1PZ, United Kingdom

J. Micro/Nanolith. MEMS MOEMS. 4(2), 023012 (May 17, 2005). doi:10.1117/1.1898243
History: Received Mar. 16, 2004; Revised Sep. 2, 2004; Accepted Sep. 3, 2004; May 17, 2005; Online May 17, 2005
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The in-plane motion of microelectrothermal actuator (“heatuator”) has been analyzed for Si-based and metallic devices. It was found that the lateral deflection of a heatuator made of a Ni metal is about ∼60% larger than that of a Si-based actuator under the same power consumption. Metals are much better for thermal actuators as they provide a relatively large deflection and large force, for a low operating temperature and power consumption. Electroplated Ni films were used to fabricate heatuators. The electrical and mechanical properties of electroplated Ni thin films have been investigated as a function of temperature and plating current density, and the process conditions have been optimized to obtain stress-free films suitable for microelectromechanical systems applications. Lateral thermal actuators have been successfully fabricated, and electrically tested. Microswitches and microtweezers utilizing the heatuator have also been fabricated and tested. © 2005 Society of Photo-Optical Instrumentation Engineers.

© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

JiKui (Jack) Luo ; Johnny H. He ; Andrew Flewitt ; D. F. Moore ; S. Mark Spearing, et al.
"Development of all metal electrothermal actuator and its applications", J. Micro/Nanolith. MEMS MOEMS. 4(2), 023012 (May 17, 2005). ; http://dx.doi.org/10.1117/1.1898243


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