Articles

Fabrication of silicon microring resonators with narrow coupling gaps

[+] Author Affiliations
Binglin Miao, Peng Yao, Janusz Murakowski, Dennis W. Prather

University of Delaware, Department of Electrical and Computer Engineering, 140 Evans Hall, Newark, Delaware 19716

J. Micro/Nanolith. MEMS MOEMS. 4(2), 023013 (May 24, 2005). doi:10.1117/1.1898605
History: Received Sep. 14, 2004; Revised Dec. 12, 2004; Accepted Dec. 20, 2004; May 24, 2005; Online May 24, 2005
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We demonstrate fabrication of silicon microring resonators with narrow coupling gaps using electron-beam lithography followed by lift-off process. Microring resonators of different diameters and 58 nm coupling gaps are fabricated in a silicon-on-insulator water. These devices are then characterized using a tunable laser source. For the microring resonator with a diameter of 7.5 μm, the measured maximum transmission is 88%, the free spectra range is 25 nm, the finesse is 28, and the Q factor is 1715. © 2005 Society of Photo-Optical Instrumentation Engineers.

© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Binglin Miao ; Peng Yao ; Janusz Murakowski and Dennis W. Prather
"Fabrication of silicon microring resonators with narrow coupling gaps", J. Micro/Nanolith. MEMS MOEMS. 4(2), 023013 (May 24, 2005). ; http://dx.doi.org/10.1117/1.1898605


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