Special Section on Polarization and Hyper-NA Lithography

High-frame-rate deep-ultraviolet-optimized charge-coupled device for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high numerical aperture imaging systems

[+] Author Affiliations
Roderick R. Kunz

Massachusetts Institute of Technology, Submicrometer Technology Group, Lincoln Laboratory, 244 Wood Street, Lexington, Massachusetts 02420-9108

Dennis D. Rathman

Massachusetts Institute of Technology, Advanced Imaging Technology Group, Lincoln Laboratory, 244 Wood Street, Lexington, Massachusetts 02420-9108

Steven J. Spector

Massachusetts Institute of Technology, Submicrometer Technology Group, Lincoln Laboratory, 244 Wood Street, Lexington, Massachusetts 02420-9108

Michael K. Rose

Massachusetts Institute of Technology, Advanced Imaging Technology Group, Lincoln Laboratory, 244 Wood Street, Lexington, Massachusetts 02420-9108

Michael Yeung

Boston University, Department of Manufacturing Engineering, Boston, Massachusetts 02215

J. Micro/Nanolith. MEMS MOEMS. 4(3), 031105 (September 23, 2005). doi:10.1117/1.2032888
History: Received January 28, 2005; Revised June 03, 2005; Accepted June 07, 2005; Published September 23, 2005
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Lincoln Laboratory has designed and fabricated a charge-coupled device (CCD) array capable of imaging both polarization and illumination uniformity. The device consists of an 1107-element linear array of UV-optimized silicon photodiodes readout by a three-stage CCD through a single 1-MHz output amplifier. This yields an effective clock rate for the whole array of 1kHz. Each of the active diode surfaces within the 1107-element array is covered by a UV-opaque layer of polysilicon into which are patterned 140-nm, transmissive sampling slits. The orientation and location of the slits enables simultaneous determination of illumination uniformity, degree and direction of polarization, and polarization uniformity. The device is tested with a 193-nm excimer laser equipped with variably polarized illumination and the theoretical performance of the device was supported by finite-difference time domain optical simulations.

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© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Roderick R. Kunz ; Dennis D. Rathman ; Steven J. Spector ; Michael K. Rose and Michael Yeung
"High-frame-rate deep-ultraviolet-optimized charge-coupled device for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high numerical aperture imaging systems", J. Micro/Nanolith. MEMS MOEMS. 4(3), 031105 (September 23, 2005). ; http://dx.doi.org/10.1117/1.2032888


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