Special Section on Polarization and Hyper-NA Lithography

Polarization influence on imaging

[+] Author Affiliations
Michael Totzeck

Carl Zeiss SMT AG, 73446 Oberkochen, Germany

Paul Gräupner

Carl Zeiss SMT AG, 73446 Oberkochen, Germany

Tilmann Heil

Carl Zeiss SMT AG, 73446 Oberkochen, Germany

Aksel Göhnermeier

Carl Zeiss SMT AG, 73446 Oberkochen, Germany

Olaf Dittmann

Carl Zeiss SMT AG, 73446 Oberkochen, Germany

Daniel Krähmer

Carl Zeiss SMT AG, 73446 Oberkochen, Germany

Vladimir Kamenov

Carl Zeiss SMT AG, 73446 Oberkochen, Germany

Johannes Ruoff

Carl Zeiss AG, 73446 Oberkochen, Germany

Donis Flagello

ASML US, Incorporated, 8555 South River Parkway, Tempe, Arizona 85284

J. Micro/Nanolith. MEMS MOEMS. 4(3), 031108 (September 21, 2005). doi:10.1117/1.2049187
History: Received March 15, 2005; Revised July 14, 2005; Accepted July 26, 2005; Published September 21, 2005
Text Size: A A A

We give a general introduction into polarized imaging and report on a Jones pupil approach for a complete evaluation of the resulting optical performance. The Jones pupil assigns a Jones matrix to each point of the exit pupil, describing the impact of both the global phase and the polarization on imaging. While we already can learn much about the optical system by taking a close look at the Jones pupil—and starting imaging simulations from it—a quantitative assessment is necessary for a complete evaluation of imaging. To do this, we generalize the concept of scalar Zernike aberrations to Jones-Zernike aberrations by expansion of the Jones pupil into vector polynomials. The resulting method is nonparaxial, i.e., the effect of the polarization-dependent contrast loss for high numerical apertures is included. The aberrations of the Jones matrix pupil are a suitable tool to identify the main drivers determining polarization performance. Furthermore, they enable us to compare the polarized and unpolarized performance of such a characterized lithographic system.

Figures in this Article
© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Michael Totzeck ; Paul Gräupner ; Tilmann Heil ; Aksel Göhnermeier ; Olaf Dittmann, et al.
"Polarization influence on imaging", J. Micro/Nanolith. MEMS MOEMS. 4(3), 031108 (September 21, 2005). ; http://dx.doi.org/10.1117/1.2049187


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Polarization gating based on Mueller matrices. J Biomed Opt 2017;22(5):56004.
Frozen Acrylamide Gels as Dynamic Nuclear Polarization Matrices. Angew Chem Int Ed Engl Published online May 23, 2017;
Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.