Articles

Design and fabrication of an electro-thermal microactuator with multidirectional in-plane motion

[+] Author Affiliations
Chi Hsiang Pan

National Chin-Yi Institute of Technology, 35, Lane 215, Section 1, Chung Shan Road, Taiping, Taichung, Taiwan

Chia-Lung Chang, Yi-Kun Chen

National Yunlin University of Science and Technology, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 4(3), 033008 (September 12, 2005). doi:10.1117/1.2040448
History: Received October 31, 2004; Revised March 08, 2005; Accepted April 20, 2005; Published September 12, 2005
Text Size: A A A

We present a new electro-thermal microactuator with multidirectional in-plane motion by selectively applying a single potential across two of four contacts. The design principle is based on the asymmetrical thermal expansion of the structure with 1. different lengths and widths of the beams, 2. varying resistivities of the beams by selectively doping, and 3. rigorous control of the thermal boundary conditions. Analytical models are derived to describe the electro-thermo-mechanical performances of the actuator. The commercial finite element package ANSYS is used to demonstrate the feasibility of the design, to verify the analytical results, and to characterize the actuator in details under complex heat transfer conditions. The design parameters that significantly affect the performance of the actuator are discussed, including the structural dimension, selective doping, and heat transfer condition. Conventional silicon-based micromachining techniques compatible with IC processes are used to fabricate the microactuator. The phosphorous-doped polycrystalline silicon film by low pressure chemical vapor deposition (LPCVD) is used to demonstrate the effectiveness of the microactuator. In conclusion, it is found that input voltages 7V are required for the microactuator to achieve the maximum displacement in 8μm and the maximum tip force in 8μN with the operating temperature below 300°C, the power as low as 10mW, and the response time about 30msec in average.

© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Chi Hsiang Pan ; Chia-Lung Chang and Yi-Kun Chen
"Design and fabrication of an electro-thermal microactuator with multidirectional in-plane motion", J. Micro/Nanolith. MEMS MOEMS. 4(3), 033008 (September 12, 2005). ; http://dx.doi.org/10.1117/1.2040448


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.