SPECIAL SECTION ON MOEMS Fiber Optics and Telecom

Optomechanical design of tunable InP-based Fabry-Perot filters for wavelength division multiplexing applications

[+] Author Affiliations
Mithilesh Ashok Shah

Institute of Materials Research and Engineering, 3, Research Link, Singapore-117602

Vicknesh Shanmugan

Institute of Materials Research and Engineering, 3, Research Link, Singapore-117602

Golam Kibria Chowdhury

Institute of Materials Research and Engineering, 3, Research Link, Singapore-117602

Ramam Akkipeddi

Institute of Materials Research and Engineering, 3, Research Link, Singapore-117602

J. Micro/Nanolith. MEMS MOEMS. 4(4), 041303 (November 07, 2005). doi:10.1117/1.2107107
History: Received October 05, 2004; Revised January 18, 2005; Accepted June 27, 2005; Published November 07, 2005
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Micromachined tunable Fabry-Perot interferometers based on compound semiconductors have earlier been proposed for fiber optic communications employing wavelength division multiplexing (WDM) for wavelengths around 1.55μm. The cavity length in micromachined interferometers is varied by displacing one of the two distributed Bragg reflector (DBR) mirrors by electrostatic actuation of supporting beams. The filter’s optical response for varying cavity lengths is simulated by a transfer matrix method, and the optical tuning efficiency of the filter is 0.53. We investigate three conventional filter designs using the finite element method (FEM) and compare it with a new proposed filter design. Using a mathematical model, deflection is analytically calculated and compared with finite element analysis results. Due to the way in which the mirror is integrated with a suspending framework of beams, bending within the mirror during actuation cannot be averted. The filter’s optical performance demands that the mirror remain so flat that the maximum bending deflection is 1nm for the mirror of given dimensions. Using a criterion based on mechanical and optical considerations, the dimensions of the beams suspending the mirror are optimized for each filter design under investigation. Combining the optical and mechanical simulations by FEM, wavelength tuning characteristics for each filter design are determined.

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© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Mithilesh Ashok Shah ; Vicknesh Shanmugan ; Golam Kibria Chowdhury and Ramam Akkipeddi
"Optomechanical design of tunable InP-based Fabry-Perot filters for wavelength division multiplexing applications", J. Micro/Nanolith. MEMS MOEMS. 4(4), 041303 (November 07, 2005). ; http://dx.doi.org/10.1117/1.2107107


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