SPECIAL SECTION ON MOEMS Fiber Optics and Telecom

Micromachined electromagnetic variable optical attenuator for optical power equalization

[+] Author Affiliations
Xuhan Dai

Shanghai Jiaotong University, National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Institute of Micro and Nano Science and Technology, Huashang Road 1954, Shanghai 200030, China

Xiaolin Zhao

Shanghai Jiaotong University, National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Institute of Micro and Nano Science and Technology, Huashang Road 1954, Shanghai 200030, China

Guifu Ding

Shanghai Jiaotong University, National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Institute of Micro and Nano Science and Technology, Huashang Road 1954, Shanghai 200030, China

Bingchu Cai

Shanghai Jiaotong University, National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Institute of Micro and Nano Science and Technology, Huashang Road 1954, Shanghai 200030, China

J. Micro/Nanolith. MEMS MOEMS. 4(4), 041304 (November 07, 2005). doi:10.1117/1.2120648
History: Received December 01, 2004; Accepted March 18, 2005; Published November 07, 2005
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A novel micromachined electromagnetic actuated variable optical attenuator is described. The attenuation level is adjusted by changing the lateral distance between two V-groove-aligned single-mode fibers. Based on the waveguide transmission theory, the relationship between the attenuation and the offset is analyzed. The fabrication of the device only enrolls common and well-known semiconductor technologies. The packaged volume of the device is 20×10×5mm3. According to the experiment results, the insertion loss is less than 1dB, the polarization dependent loss is less than 0.1dB, dynamic range is larger than 50dB, and the driving voltage is less than 5V. It is proven to be a low-cost, high-performance passive device for future all-optical networks.

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© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Xuhan Dai ; Xiaolin Zhao ; Guifu Ding and Bingchu Cai
"Micromachined electromagnetic variable optical attenuator for optical power equalization", J. Micro/Nanolith. MEMS MOEMS. 4(4), 041304 (November 07, 2005). ; http://dx.doi.org/10.1117/1.2120648


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