SPECIAL SECTION ON MOEMS Display and Spectroscopy

Programmable diffraction gratings and their uses in displays, spectroscopy, and communications

[+] Author Affiliations
Stephen D. Senturia

Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 and, Polychromix, 30 Upton Drive, Wilmington, Massachusetts 01887

David R. Day

Polychromix, 30 Upton Drive, Wilmington, Massachusetts 01887

Michael A. Butler

Polychromix, 30 Upton Drive, Wilmington, Massachusetts 01887

Malcolm C. Smith

Polychromix, 30 Upton Drive, Wilmington, Massachusetts 01887

J. Micro/Nanolith. MEMS MOEMS. 4(4), 041401 (November 07, 2005). doi:10.1117/1.2107687
History: Received September 27, 2004; Revised February 24, 2005; Accepted April 04, 2005; Published November 07, 2005
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Microelectromechanical systems (MEMS) and optics are a natural match. There are several reasons: MEMS devices have dimensions and achievable actuation distances comparable to the wavelength of light; smooth-surfaced dielectrics, semiconductors, and metals can be used in various combinations; and, since redirection of photons does not require large forces, the relatively feeble MEMS actuators can easily manipulate them. Micro-optical-electromechanical systems (MOEMS) are those where optics merge with MEMS. Many MOEMS devices are based on mirror arrays that can be tilted using electrostatic actuation. This work, however, focuses on programmable diffraction gratings and their uses for projection displays, spectroscopy, and wavelength management in modern optical telecommunication systems.

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© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Stephen D. Senturia ; David R. Day ; Michael A. Butler and Malcolm C. Smith
"Programmable diffraction gratings and their uses in displays, spectroscopy, and communications", J. Micro/Nanolith. MEMS MOEMS. 4(4), 041401 (November 07, 2005). ; http://dx.doi.org/10.1117/1.2107687


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