SPECIAL SECTION ON MOEMS Display and Spectroscopy

Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS

[+] Author Affiliations
Christophe Gorecki

Université de Franche-Comté, Départment d’Optique, Franche-Comté Electronique Mecanique Thermique et Optique-Sciences et Technologies (FEMTO-ST), 16 Route de Gray, 25030 Besançon Cedex, France

Michał Józwik

Université de Franche-Comté, Départment d’Optique, Franche-Comté Electronique Mecanique Thermique et Optique-Sciences et Technologies (FEMTO-ST), 16 Route de Gray, 25030 Besançon Cedex, France

Leszek Sałbut

Warsaw University of Technology, Institute of Micromechanics and Photonics, 8 Sw. A. Boboli Street, 02-525 Warsaw, Poland

J. Micro/Nanolith. MEMS MOEMS. 4(4), 041402 (November 23, 2005). doi:10.1117/1.2110027
History: Received November 29, 2004; Revised May 09, 2005; Accepted May 09, 2005; Published November 23, 2005
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We develop a multifunctional interferometric platform for testing MEMS/MOEMS, measuring 3-D out-of-plane deflections and providing both material properties and motion behavior of microdevices. Specific metrology procedures are demonstrated to determine respectively the residual stress of silicon membranes compressively prestressed by SiOxNy plasma-enhanced chemical vapor deposition (PECVD), the vibration modes of PZT microactuators, as well as the expertise of scratch drive actuators.

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© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Christophe Gorecki ; Michał Józwik and Leszek Sałbut
"Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS", J. Micro/Nanolith. MEMS MOEMS. 4(4), 041402 (November 23, 2005). ; http://dx.doi.org/10.1117/1.2110027


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