SPECIAL SECTION ON MOEMS Display and Spectroscopy

Design, fabrication, and performance of a micromachined plasma spectrometer

[+] Author Affiliations
Danielle M. Wesolek

The Johns Hopkins University, Applied Physics Laboratory, Laurel, Maryland 20723

Fred A. Hererro

NASA Goddard Space Flight Center, Code 553, Greenbelt, Maryland 20771

Robert Osiander

The Johns Hopkins University, Applied Physics Laboratory Laurel, Maryland 20723

M. Ann Garrison Darrin

The Johns Hopkins University, Applied Physics Laboratory Laurel, Maryland 20723

J. Micro/Nanolith. MEMS MOEMS. 4(4), 041403 (November 07, 2005). doi:10.1117/1.2114767
History: Received October 01, 2004; Revised March 14, 2005; Accepted April 21, 2005; Published November 07, 2005
Text Size: A A A

Through the application of a new approach to energy analysis to microelectromechanical systems, the flat plasma spectrometer (FlaPS) provides a solution to the investigation of plasma distributions in space. It is capable of measuring the kinetic energy and angular distributions of ions in the space environment for energies ranging from a few eV to 50keV. A single pixel of a FlaPS instrument has been designed, built, and tested to occupy a volume of 1cm3, and is characterized by a high throughput-to-volume ratio, making it an ideal component for small-scale satellites. The focus of this work is on the design, fabrication, simulation, and testing of the instrument front end that consists of a collimator, parallel plate energy analyzer, and energy selector mask. Advanced microfabrication techniques enable fabrication of the miniature plasma spectrometer with geometric factor 4.9×105cm2-sr per pixel and an entrance aperture area of 0.01cm2. Arrays of narrow collimator channels with 4-deg angular divergence and high transmission allow energy analysis of ions without the need for focusing, the key feature that enables large mass reduction. It is also shown that the large plate factors achievable with this approach to energy analysis offer definite advantages in reducing the need for excessively high voltages.

Figures in this Article
© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Danielle M. Wesolek ; Fred A. Hererro ; Robert Osiander and M. Ann Garrison Darrin
"Design, fabrication, and performance of a micromachined plasma spectrometer", J. Micro/Nanolith. MEMS MOEMS. 4(4), 041403 (November 07, 2005). ; http://dx.doi.org/10.1117/1.2114767


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.