SPECIAL SECTION ON MOEMSMicromirrors and Adaptive Optics

Closed-loop adaptive control for electrostatically driven torsional micromirrors

[+] Author Affiliations
Ke-Min Liao

National Tsing Hua University, Department of Power Mechanical Engineering, Hsinchu, Taiwan

Yi-Chih Wang

National Tsing Hua University, Department of Power Mechanical Engineering, Hsinchu, Taiwan

Chih-Hsien Yeh

National Tsing Hua University, Department of Power Mechanical Engineering, Hsinchu, Taiwan

Rongshun Chen

National Tsing Hua University, Department of Power Mechanical Engineering, Hsinchu, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 4(4), 041503 (November 07, 2005). doi:10.1117/1.2110145
History: Received September 23, 2004; Revised June 27, 2005; Accepted August 08, 2005; Published November 07, 2005
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We demonstrate a closed-loop adaptive control scheme for achieving accurate positioning and trajectory tracking of an electrostatically driven torsional micromirror. Compared to the conventional proportional-integral-derivative (PID) controller, the proposed adaptive self-tuning controller has advantages of on-line compensating parameter variations and model uncertainty of the torsional micromirror, resulting from fabrication imperfections. Numerical simulation results utilizing MATLAB indicate that the proposed adaptive controller has a better transient response and can more precisely follow the reference trajectory, compared to the PID control scheme. The torsional micromirror is designed and successfully fabricated using surface micromachining processes. Real-time experimental results demonstrate that the proposed adaptive control is feasible and can improve the performance of the micromirror.

© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Ke-Min Liao ; Yi-Chih Wang ; Chih-Hsien Yeh and Rongshun Chen
"Closed-loop adaptive control for electrostatically driven torsional micromirrors", J. Micro/Nanolith. MEMS MOEMS. 4(4), 041503 (November 07, 2005). ; http://dx.doi.org/10.1117/1.2110145


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