Formulas for lithographic parameters when printing isolated and dense lines

Lex Straaijer

doi:10.1117/1.2140247

1 October 2005 Formulas for lithographic parameters when printing isolated and dense lines

Lex Straaijer

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 4, Issue 4, 043001 (October 2005). https://doi.org/10.1117/1.2140247

Abstract

Some practical physics-based formulas have been derived to make quick estimates of imaging performances in lithographic systems. These formulas have a simple structure so that they can be used in mathematical worksheets or, if desired, on a pocket calculator. Formulas have been derived to predict the printing of dense lines, bright field isolated lines, and dark field isolated spaces in positive resist. They are for exposures from binary masks and give exposure latitude, focus depth, and change in critical dimension. These parameters are also derived as a function of fading of the aerial images in lateral and focal directions. Validity has been checked with simulations. It proved that, in cases of the aerial image fading and of focus depth evaluation, only a few adjustment parameters were needed to obtain a reasonably good match with simulations. A table with all basic imaging parameters and their dependence on disturbances such as fading is included.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Lex Straaijer "Formulas for lithographic parameters when printing isolated and dense lines," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(4), 043001 (1 October 2005). https://doi.org/10.1117/1.2140247

Published: 1 October 2005

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available