Articles

Polymer stretching to produce flat suspended micromembranes

[+] Author Affiliations
Kevin J. Campbell

Brigham Young University, Electrical and Computer Engineering Department, 459 Clyde Building, Provo, Utah 84602

Jacey C. Morine

Brigham Young University, Electrical and Computer Engineering Department, 459 Clyde Building, Provo, Utah 84602

Zachary A. George

Brigham Young University, Electrical and Computer Engineering Department, 459 Clyde Building, Provo, Utah 84602

Stephen M. Schultz

Brigham Young University, Electrical and Computer Engineering Department, 459 Clyde Building, Provo, Utah 84602

Aaron R. Hawkins

Brigham Young University, Electrical and Computer Engineering Department, 459 Clyde Building, Provo, Utah 84602

Craig P. Lusk

Brigham Young University, Mechanical Engineering Department, 435 Crabtree Building, Provo, Utah 84602

Larry L. Howell

Brigham Young University, Mechanical Engineering Department, 435 Crabtree Building, Provo, Utah 84602

J. Micro/Nanolith. MEMS MOEMS. 4(4), 043005 (November 07, 2005). doi:10.1117/1.2075267
History: Received April 29, 2005; Revised June 21, 2005; Accepted June 22, 2005; Published November 07, 2005
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A microfabrication technique specifically applicable for making structures with thin, flat air gaps is presented. The technique relies upon heating a polymer causing it to contract and form a stretched micromembrane across stationary platforms. To validate and quantify this process, structures were made using SU8, a spin-on photosensitive epoxy, as the polymer attached to a silicon substrate. The stretching of the SU8 in these structures for different heat treatments was characterized using a mechanical profilometer. Optical interference effects were also used to evaluate the overall flatness of these structures based on the reflected colors across their surfaces. SU8 membranes up to 200 micrometers wide were successfully stretched flat with variations in the underlying air-gap thickness of less than 20nm.

Figures in this Article
© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Kevin J. Campbell ; Jacey C. Morine ; Zachary A. George ; Stephen M. Schultz ; Aaron R. Hawkins, et al.
"Polymer stretching to produce flat suspended micromembranes", J. Micro/Nanolith. MEMS MOEMS. 4(4), 043005 (November 07, 2005). ; http://dx.doi.org/10.1117/1.2075267


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