Articles

High-performance microfabricated angular rate sensor

[+] Author Affiliations
Tracy D. Hudson

U. S. Army Aviation and Missile Research, Development, and Engineering Center , AMSRD-AMR-WS-ID, Redstone Arsenal, Alabama 35898

Sherrie W. Holt

U. S. Army Aviation and Missile Research, Development, and Engineering Center , AMSRD-AMR-WS-ID, Redstone Arsenal, Alabama 35898

Paul Ruffin

U. S. Army Aviation and Missile Research, Development, and Engineering Center , AMSRD-AMR-WS-ID, Redstone Arsenal, Alabama 35898

Michael Kranz

Morgan Research Corporation , 4811A Bradford Drive, Huntsville, Alabama 35805

Jim McKee

Morgan Research Corporation , 4811A Bradford Drive, Huntsville, Alabama 35805

Michael Whitley

Morgan Research Corporation , 4811A Bradford Drive, Huntsville, Alabama 35805

Milan Buncick

AEgis Technologies Group, Incorporated , 631 Discovery Drive, Huntsville, Alabama 35806

Eric Tuck

AEgis Technologies Group, Incorporated , 631 Discovery Drive, Huntsville, Alabama 35806

J. Micro/Nanolith. MEMS MOEMS. 4(4), 043006 (November 07, 2005). doi:10.1117/1.2114787
History: Received March 04, 2005; Revised June 06, 2005; Accepted June 06, 2005; Published November 07, 2005
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The development of a miniature angular rate sensor based on silicon-on-insulator (SOI) microfabrication technology is presented. The design, fabrication, integration, and inertial testing of a MEMS-based angular rate sensor with large dynamic range were the driving forces behind this research. The design goals of 10-degh bias stability while operating through 2000-degs roll environments are presented. The sensor design is based on a straightforward single-mask fabrication approach that utilizes deep reactive ion etching of a 100-μm-thick device layer, with a buried 2-  to 3-μm oxide layer used as the sacrificial layer, in an SOI substrate. To date, the data show demonstrated bias drift performance of 60degh over this fast-roll environment.

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© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Tracy D. Hudson ; Sherrie W. Holt ; Paul Ruffin ; Michael Kranz ; Jim McKee, et al.
"High-performance microfabricated angular rate sensor", J. Micro/Nanolith. MEMS MOEMS. 4(4), 043006 (November 07, 2005). ; http://dx.doi.org/10.1117/1.2114787


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