Articles

High-energy scanning electron microscope for the observation of subsurface structures

[+] Author Affiliations
Miyako Matsui

Hitachi, Ltd., Central Research Laboratory, 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8602, Japan

Syuntaro Machida

Hitachi, Ltd., Central Research Laboratory, 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8602, Japan

Hideo Todokoro

Hitachi High-Technologies Corporation, 882 Ichige, Hitachinaka, Ibaraki, 312-8504, Japan

Tadashi Otaka

Hitachi High-Technologies Corporation, 882 Ichige, Hitachinaka, Ibaraki, 312-8504, Japan

Aritoshi Sugimoto

Hitachi High-Technologies Corporation, 1-24-14 Nishi-Shimbashi, Minato-ku, Tokyo, 105-8717, Japan

J. Micro/Nanolith. MEMS MOEMS. 4(4), 043007 (November 07, 2005). doi:10.1117/1.2073767
History: Received March 28, 2005; Revised May 24, 2005; Accepted June 02, 2005; Published November 07, 2005
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We propose a technique using high-energy scanning electron microscope (SEM), which has the advantage of measuring 3-D structures and underlayer structures when compared to conventional low-energy SEM, to meet future metrology requirements. At first, we demonstrate that a technique using high-energy SEM has the advantages of measuring gate structures with a spatial resolution of a few nanometers. For example, a notched gate structure was most clearly visible when the beam energy is at 200keV. Another example of a polyside gate with a sidewall spacer was most clearly visible at 100keV. In addition, we studied the relationship between the thickness of the upper layer and beam energy at which the structure of the underlayers can be observed. The beam energy should be high enough to pass through the upper layer without the incident beam becoming broader, but low enough for the incident electrons to be backscattered at the structures in the underlayer. We could observe the line structures at a depth of 800nm or less using an incident beam with energy from 50 to 100keV.

© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Miyako Matsui ; Syuntaro Machida ; Hideo Todokoro ; Tadashi Otaka and Aritoshi Sugimoto
"High-energy scanning electron microscope for the observation of subsurface structures", J. Micro/Nanolith. MEMS MOEMS. 4(4), 043007 (November 07, 2005). ; http://dx.doi.org/10.1117/1.2073767


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