Special Section on Nanopatterning

Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication

[+] Author Affiliations
M. Worgull, M. Heckele

Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, Postfach 36 40, 76021 Karlsruhe, Germany

J. F. Hétu, K. K. Kabanemi

National Research Council of Canada, Industrial Materials Institute, 1500 Montreal Rd., Ottowa, Ontario K1A 0R6, Canada

J. Micro/Nanolith. MEMS MOEMS. 5(1), 011005 (February 22, 2006). doi:10.1117/1.2176729
History: Received March 01, 2005; Revised July 01, 2005; Accepted September 01, 2005; Published February 22, 2006
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Hot embossing and injection molding belong to the established plastic molding processes in microengineering. Based on experimental findings, a variety of microstructures have been replicated using these processes. However, with increasing requirements regarding the embossing surface, and the simultaneous decrease of the structure size down into the nanorange, increasing know-how is needed to adapt hot embossing to industrial standards. To reach this objective, a German-Canadian cooperation project has been launched to study hot embossing theoretically by process simulation and experimentally. The present publication reports on the proceeding and present first results.

© 2006 Society of Photo-Optical Instrumentation Engineers

Citation

M. Worgull ; M. Heckele ; J. F. Hétu and K. K. Kabanemi
"Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication", J. Micro/Nanolith. MEMS MOEMS. 5(1), 011005 (February 22, 2006). ; http://dx.doi.org/10.1117/1.2176729


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