Special Section on Nanopatterning

Replication of deep x-ray lithography fabricated microstructures through casting of soft material

[+] Author Affiliations
F. Pérennès

Sincrotrone Trieste, Area Science Park, S. S. 14 Km 163,5, Basovizza I-34012, Italy

B. Marmiroli, M. Tormen

INFM-TASC, Area Science Park, S. S. 14 km 163,5, 34012 Basovizza-Trieste, Italy

M. Matteucci

Sincrotrone Trieste, Area Science Park, S. S. 14 Km163,5, Basovizza I-34012, Italy

E. Di Fabrizio

Università Magna Graecia, BIONEM Lab, Campus Germaneto viale Europa, 88100 Catanzaro, Italy

J. Micro/Nanolith. MEMS MOEMS. 5(1), 011007 (March 28, 2006). doi:10.1117/1.2176730
History: Received March 01, 2005; Revised May 01, 2005; Accepted November 08, 2005; Published March 28, 2006
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We introduce simple double-casting replication methods for high-aspect-ratio microstructures fabricated by deep x-ray lithography using intermediate molds of soft materials. Two types of soft material are investigated. The ability to fabricate polymethylsiloxane (PDMS) molds with well-type structures with aspect ratios up to 35:1 is demonstrated for structure densities below 50%, and the reproduction from this mold of pillar-type polymethyl methacrylate (PMMA) structures with aspect ratios of 20:1 is achieved. Polyvinyl alcohol (PVA), a water soluble polymer, is also tested as a sacrificial intermediate mold and successfully used for the replication of structures with aspect ratios up to 5:1. Double-casting replication methods are described and discussed for their potential improvement.

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© 2006 Society of Photo-Optical Instrumentation Engineers

Citation

F. Pérennès ; B. Marmiroli ; M. Tormen ; M. Matteucci and E. Di Fabrizio
"Replication of deep x-ray lithography fabricated microstructures through casting of soft material", J. Micro/Nanolith. MEMS MOEMS. 5(1), 011007 (March 28, 2006). ; http://dx.doi.org/10.1117/1.2176730


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