Special Section on Nanopatterning

Regrowth of self-assembled InAs quantum dots on nanohole and stripe templates

[+] Author Affiliations
Suwaree Suraprapapich, Songphol Kanjanachuchai, Supachok Thainoi, Somsak Panyakeow

Chulalongkorn University, Semiconductor Device Research Laboratory, Department of Electrical Engineering, Bangkok 10330, Thailand

J. Micro/Nanolith. MEMS MOEMS. 5(1), 011008 (February 22, 2006). doi:10.1117/1.2177287
History: Received March 01, 2005; Revised May 09, 2005; Accepted August 01, 2005; Published February 22, 2006
Text Size: A A A

Self-assembled InAs quantum dots (QDs) are grown on two types of templates by molecular beam epitaxy (MBE). A nanohole template is prepared by first growing InAs QDs on a GaAs substrate by a standard MBE process, then capping the QDs with a thin lattice-mismatched layer of GaAs. Subsequent annealing of the nanohole template results in a stripe template. We are able to transfer the patterns of self-assembled QDs onto these two types of templates: regrowth on the nanohole template results in uniform QDs situated in the nanoholes, while regrowth on the stripe template results in chains of QDs aligned along the stripes. Our results imply that self-assembled QDs can be grown onto in-situ prepared patterned substrates, with limited degree of randomness.

Figures in this Article
© 2006 Society of Photo-Optical Instrumentation Engineers

Citation

Suwaree Suraprapapich ; Songphol Kanjanachuchai ; Supachok Thainoi and Somsak Panyakeow
"Regrowth of self-assembled InAs quantum dots on nanohole and stripe templates", J. Micro/Nanolith. MEMS MOEMS. 5(1), 011008 (February 22, 2006). ; http://dx.doi.org/10.1117/1.2177287


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.